Mems Inspection

Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible “micromachining” processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.

For more information:

http://www.memsnet.org/mems/what-is.html

http://www.dwfritz.com/markets_and_applications/mems

http://www.memx.com

Precision mems inspection system built by DWFritz